GE the new probing plugin for Mach 3 is fair, but it isn't perfect yet. Art kinda got it going and put it out so others could then take the pluging and continue to develope it.
I bent a probe tip with it but am not so sure it was the software or my with my settings. I have run several test digitizing a small pistol grip that measures about 4" X 2" X .250" and it would get up to almost 9000 point per probe rate. At that rate it will take a little over an hr to probe a 6X6 at .05. Stay close by the machine!
ps I might add, I have not downloaded the lastes version of Mach3 and Art says it is nearly bug free, so that might make it better.