They might be too fine, but piezo-electric elements have been used for such things as tunneling electron microscopes and fringe locking circuits for lasers. In the microscope they use a stack of them to get range.
http://www.geocities.com/spm_stm/Disk_Scanner_Exp.html http://sxm4.uni-muenster.de/stm-en/ http://www.xmission.com/~ralcon/whylock.html